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Products

CMP Consumables
- Post-CMP Cleaning Brushes
- CMP Slurry Filtration
- Retaining Rings
- Pad Conditioners
Filtration
- AMC Filtration
- Gas Diffuser
- Gas Filtration
- Liquid Filtration
- CMP Slurry Filtration
Fluid Handling
- pHasor® II Membrane Contactor
- pHasor® X Heat Exchanger
Wafer/Reticle Handling
IC Device Handling
Purification
- Gas Purification
- Liquid Purification
Disk Drive Handling
Specialty Materials
- Premium Graphite & Silicon Carbide
- Polymer Composites
- Specialty Coatings
Systems
- Liquid Systems
Emerging Technologies
- E-clamps
- Fuel Cells
- pHasor® X Heat Exchanger
- Retaining Rings
- Pad Conditioners
- Product Category
- Regas
- Liquid Systems

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Silicon Carbide

The SUPERSiC Material System allows customization of basic silicon carbide. Select from groups of infiltration materials, cleaning options, coating materials and thicknesses to optimize material for specific applications.

Click here for more information on Poco Graphite's SUPERSiC® Material System