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Protego® Filters/Purifiers

Metal ion purifiers and filters
The Protego® family of metal ion purifers and purifier/filter cartridge and disposable filters remove metal ion contamination from UPW and select organic solvents. Protego metal ion purifiers deliver ultimate protection from metal ion contamination by providing high-capacity single-pass removal of metal ions. Protego purifiers are ideal for critical cleaning applications including DI water rinse on recirculation and single-pass process tools, wafer dry and post-CMP clean.
Protego® Plus HT High-Temperature Metal Ion Purifiers
Metal ion purifiers deliver ultimate protection from metal ion contamination at high temperatures (up to 80°C)
  • High-capacity multiple cation exchange technology delivers high removal rates of multiple metallic cation contamination in both single-pass and recirculation applications, with long lifetime capacity. Ensures maximum system uptime.
  • Specific designs taliored by applications need: High-flow HT/HTX products designed for high-temperature (<60°C) applications
  • Standard and high-flow cartridges and point-of-use (POU) disposable filter designs available
  • Purifier/filter available in retention ratings of 0.05 μm and 0.10 μm. The combined purifier/filter eliminates the need for additional components in your fluid delivery system. Provides excellent small particle retention. Reduces component costs and maximizes system uptime.
  • Easy installation and retrofit into existing applications: Cartridge - bulk and point-of-tool; Disposable - POU and Lab scale applications
Protego® Plus LT Low-Temperature Metal Ion Purifiers
Metal ion purifiers deliver ultimate protection from metal ion contamination at low temperatures (>60°C)
  • High-capacity multiple cation exchange technology delivers high removal rates of multiple metallic cation contamination in both single-pass and recirculation applications, with long lifetime capacity. Ensures maximum system uptime.
  • Specific designs taliored by applications need: High-flow LT/LTX products designed for low-temperature (>60°C) DI Water applications
  • Standard and high-flow cartridges and point-of-use (POU) disposable filter designs available
  • Purifier/filter available in retention ratings of 0.05 μm and 0.10 μm. The combined purifier/filter eliminates the need for additional components in your fluid delivery system. Provides excellent small particle retention. Reduces component costs and maximizes system uptime.
  • Easy installation and retrofit into existing applications: Cartridge - bulk and point-of-tool; Disposable - POU and Lab scale applications
Protego® CF Metal Ion Purifier/Filters - SCHEDULED TO BE DISCONTINUED DECEMBER 2010
Removes metal ion contamination from ultrapure water and some organic solvents
  • Clean device design enables rapid start up and maximum system uptime
  • Easily installed or retrofitted into existing systems
  • Combination fiter and purifier eliminates the need for additional costly components
  • Available in retention ratings of 0.05 µm and 0.10 µm
  • Available in cartridge and disposable capsule designs