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Solaris® Filters

Point-of-Use CMP Slurry Filter
Entegris’ Solaris® graded density CMP slurry filters provide point-of-use (POU) CMP applications the critical performance balance between the removal of defect-causing agglomerate gels and the delivery of the necessary slurry solution to the wafer surface. Designed for use in copper, STI, ILD and tungsten applications, the wide variety of Solaris filters capture particles in silica, ceria or alumina slurries.
Solaris CL Depth Filters
Point-of-Use (POU) CMP Filter
  • Designed to meet the needs of next-generation point-of-use (POU) slurries
  • Optimized depth media with superior agglomerate and gel holding capability prolongs filter life over traditional depth filters
  • Self-venting in vertical installation ensures optimum flow characteristics
  • All polypropylene construction with melt-blown wrapped depth filtration media
  • Optimized wrapped media provides enhanced balance of retention of retention with filter lifetime
  • Disposable, Connectology® design enables rapid, safer installation
Solaris SCR Filters
Point-of-Use CMP Filter
  • Unique stacked bed media design allows precise filtration performance
  • Available as a 5” and 10” disposable filter
  • Available in 1.5 µm and 3.0 µm retention ratings
  • All polypropylene construction with melt-blown stacked bed depth filtration media
Solaris CM Depth Filters
Continuous melt blown depth media filters for removal of hard particles and gels in suspended solids
  • Unique continuous melt-blown, multi-gradient depth media provides long lasting filtration performance
  • All polypropylene construction
  • Available in several retention ratings to match the specific needs of single pass retention and lifetime requirements
  • Self-venting in vertical installation ensures optimum flow characteristics
  • Disposable design for rapid filter changeout and less slurry waste
  • Available with Connectology® technology for fast changeout