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Acid - Weak

Durable, high-purity PTFE, UPE and PES/PS membranes

Liquid filtration of weak acids. Generally these materials are used in lower concentrations, low pH and moderate temperatures (60-80°C). They include: non-oxidizing chemistries, hydrochloric acid (HCL), acetic acids, citric, hydrofluoric (HF), weak SC2 cleans and buffred oxide etch (BOE). Entegris filters recommended for weak acids use PTFE, UPE and PES/PS membranes for ultra purity and durability.
Intercept® Cartridge and Disposable Filters
Hydrophilic dual-capture membrane for superior particle removal in batch baths, single wafer tools, and chemical delivery systems in a high-flow filter
  • Dual-particle capture mechanism - patented hydrophilic membrane structure provides enhanced particle removal capabilities
  • High flow hydrophilic membrane with large filtration area provides rapid particle removal and microbubble control for faster bath startup/system qualification and increased yields
  • Extreme cleanliness in terms of particle shedding and metal extractables
  • High sieving retention at filter's rating
  • Available in a variety of retention ratings from 0.2 µm down to 20 nm to cover a broad scope of process requirements
Guardian™ ECD Cartridge Filters
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
  • Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
  • Highly hydrophilic surfaces reduce the potential for microbubble formation
  • High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
  • Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
Etchgard™ HP Cartridge Filters
Hydrophilic, high-performance filters for HF and BOE recirculation bath processes
  • Designed for use with Chemlock® housings for rapid filter changeout
  • High flow membrane provides rapid particle removal and microbubble control for faster bath startup and system qualification
  • Patented hydrophilic membrane structure eliminates nucleation sites to reduce the potential for microbubble formation
ProcessGard® PES Cartridge and Disposable Filters
PES filters for weak acids, bases and DI water filtration
  • Asymmetric PES structure provides longer life-time and high flow rate
  • Hydrophilic PES media eliminates prewetting treatment, reduces filter changeout time and increases equipment uptime
  • Various retention ratings, fitting sizes and types to meet various requirements
Panelgard® 226 Plus PES Cartridge Filter
High Flow PES cartidge filter for flat panel display applications using weak acids/bases or DI Water