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Etchgard™ Filters

Hydrophilic liquid filters for recirculated bath processes
Etchgard™ hydrophilic high-performance cartridge filters ensure rapid particle removal in HF and BOE recirculation baths processes. Etchgard filters are comprised of a patented hydrophilic membrane structure that eliminates nucleation sites, to reduce the potential for microbubble formation. The result – rapid system startup, elimination of bubble generation, elimination of bubble-induced performance issues, high flow rates, and minimum pressure drop. Etchgard filters provide dramatic improvements in Overall Equipment Efficiency (OEE).
Etchgard HP and HPX Cartridge Filters
Hydrophilic, high-performance filters for HF and BOE recirculation bath processes
  • Designed for use with Chemlock® housings for rapid filter changeout
  • High flow membrane provides rapid particle removal and microbubble control for faster bath startup and system qualification
  • Patented hydrophilic membrane structure eliminates nucleation sites to reduce the potential for microbubble formation
  • HPX: High membrane area - 11000 cm2 (11.8 ft.2), provides high flow at minimal pressure drop with long-life process capacity