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Surface Mount Metal Gas Filter

For 1.125", 1.5" IGS application (C or W-seal)

Nickel or stainless steel membrane with stainless steel housing - for 1.125", 1.5" IGS application (C or W-seal)

Wafergard C2 1.125" C-Seal Surface Mount Sandwich Gas Filters
All-metal ultrapure filter dramatically reduces footprint
  • Provides the industry’s best filter in a surface-mount design
  • Inlet feed through to device mounted above provides filtration/protection of returning gas to ensure cleanliness for downstream devices
  • Available with nickel or stainless membrane
Wafergard W-Seal Surface-Mount Gas Filters
All-metal W-seal gas filters for ultrapure surface-mount applications
  • Entegris’ best filters in a W-seal surface mount design
  • Ideal for high-temperature and dynamic-pressure applications
  • Available with stainless steel membrane for inert, hydride and CO gases
  • Available with nickel membrane for inert and reactive gases