header top curve
Home   >   Products   >   Filtration   >   Gas Filtration   >   In-line Teflon® Gas Filter

Products

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

In-line Teflon® Gas Filter

For all chemical resistance applications

Teflon® membrane with stainless steel housing - for all chemical resistance applications
Wafergard II F Micro In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
  • Compact footprint with a maximum diameter of 19.05 mm (0.75")
Wafergard MAX In-line Teflon® Gas Filters
Superior particulate filtration for ultrapure gas applications
  • All Teflon® filter element provides the industry’s best performance for ultrapure applications
  • Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
  • Specifically designed for high flow and low delta pressure applications
  • For use with inert and reactive gases, including ozone
  • Pre-conditioned for fast startup (Silver only)
  • Select ultrahigh purity (Silver) or high purity (Bronze) surface finish
Wafergard II F Mini XL In-line Gas Filters
Superior particulate filtration for ultrapure gas systems
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
Wafergard II F-40 Gas Filters
Superior particulate filtration for ultrapure gas systems
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
Wafergard T-line Gas Filters
Clean, dry air for industrial applications
  • Flow rates of up to 1500 SLPM (50 SCFM)
  • Effectively retains particles of 0.003 μm size and above
  • Easy filter replacement without breaking gas line connections
  • For use in non-toxic and non-flammable inert gas
  • Available with 6-stack, 12-stack and 40-stack gas cartridge filters
Wafergard II F-6 Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • PTFE membranes provide high efficiency filtration
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
Wafergard GTL In-line Gas Filters
Remove particles from inert gases for flow rates up to 80 SLPM
  • Efficient, low-cost point-of-use filtration of inert gases
  • For flow rates up to 80 SLPM
Wafergard GT-Plus In-line Gas Filters
Remove particles from inert gases for flow rates up to 30 SLPM
  • Efficient, low-cost point-of-use filtration of inert gases
  • For flow rates up to 30 SLPM