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Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

Amorphous, dense and microconformal coatings deposited at low temperature

Entegris specializes in deposition of high performance coatings using a proprietary low temperature (<150°C) PECVD processes. Developed from the Surmet™ specialty coating technologies, the coatings are deposited in high vacuum by plasma decomposition of precursor gases. PECVD deposition is used on a variety of vacuum compatible substrates including metals, alloys, ceramics, semiconductors and polymers.

 

Benefits:

  • Amorphous and dense
  • Ultra high pure (99.999%)
  • Microconformal:  They replicate the surface finish of the substrate
  • Deposited on variety of substrates including metals, ceramics and polymers
  • Uniform deposition on complex 3-D objects
  • Wide area coating capability, including entire process chambers

 

 

Process Capabilities:
Entegris has chambers ranging from 12” to 40” diameter target area to accomodate different shapes and sized items
SilcoMax™ Coating
Ultrapure silicon carbide coating
  • Applications in semiconductor equipment
  • Oxidation protection, especially in the presence of moisture
  • Innovative low temperature plasma process to deposit a variety of silicon carbide coatings
  • Dense, micro-conformal, high purity coatings have very low residual stress
  • High purity, dense and micro-conformal coating technology
Silicon Oxide Coating
Particle reduction during semiconductor wafer processing and IR Optics
  • Oxidation/corrosion protection
  • Optically transparent
  • Excellent breakdown voltage
  • AR properties of the coating make it suitable for coating IR optics
Transimax™ Coating
Transparent hard silicon nitride coating
  • Low temperature vacuum plasma process to deposit a series of Silicon Nitride coatings
  • Suitable for high-temperature oxidation/corrosion protection of ceramic materials
  • Reduces particles during semiconductor wafer processing
  • Excellent breakdown voltage
  • Optically transparent
UltraC Diamond™ Coating
Ultimate abrasive wear resistance
  • For use in biomedical implants, air bearings, cutting, dicing and slicing tools along with other anti-friction and wear applicaitons
  • Stops the formation of macro and submicroscopic wear debris
  • Corrosion resistant
  • Extremely wear resistant
  • Ultra low friction
  • Super hard
UltraC-HT™ Coating
Exceptionally tough diamond-like carbon
  • Applications in semiconductor, medical, aerospace and air bearings
  • Mono-dimensionally modulated (MDM) coating system consists of individual layers of two materials differing in elastic modulus
  • Excellent abrasive/erosion wear resistance
  • Super lubricious
  • Extreme toughness
  • High strength
Ultrapure Silicon Coating
Dense, high performance, strongly-adherent, conformal coating of silicon
  • Dense, hard and micro-conformal
  • Excellent adhesion and compliance on a wide variety of substrates
  • Excellent surface smoothness
  • Low residual stress