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Planarcore PVA Brushes

For Applied Materials® Reflexion® and Mirra Mesa® equipment
 
Planarcore PVA Brushes
  • Optimized for the needs of next-generation copper and ILD applications
  • Designed with molded-through-the-core construction
  • Polypropylene mandrel and polyvinyl alcohol (PVA) brush construction
 
Planarcore PVA Brushes
Materials of construction:
 Core/mandrel: All Polypropylene

Brush: Polyvinyl Alcohol (PVA)

Preservative: 0.5% H2O2
Certificate of analysis
 30% Compressive Stress: 90 g/cm2

Outside diameter: 70 mm +/-1 mm

OD concentricity/runout: <0.03”