Products & Services

For ease of installation and fast change-out, Entegris offers point-of-use solutions encompassing filter cartridge housings and manifolds. Entegris' filter cartridge housings meet the highest standards of process fluid purity.

Entegris' purification solutions deliver ultimate protection against metal ion contamination from ultrapure water and some organic solvents. They enable critical cleaning applications such as DI water rinse on re-circulation and single pass process tools, wafer dry and post CMP clean.

Entegris' liquid filtration solutions enable critical processes that yield the world's leading technologies.

Entegris' polyvinyl acetal (PVA) products revolutionize CMP post-cleaning and polishing applications. Our Planarcore® PVA disposable brushes reduce tool downtime and decrease on-wafer defectivity.