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Wafer/Reticle Handling

Entegris is the industry leader and supplier of choice for predictable, reliable and innovative wafer and reticle handling solutions.

 

Wafer Shipping and Processing

Entegris wafer carriers are the de facto standard for protecting and transporting wafers during processing within the fab environment. We supply these products to every major fab in the world and in sizes from 63.5 mm to 450 mm. Our most recent innovation for wafer handling is the Spectra™ Front Opening Unified Pod (FOUP) with advanced features to increase yields and productivity.

 

Innovative wafer shipping products from Entegris move wafers from facility to facility everyday and throughout the world. Entegris wafer shippers—such as the Ultrapak® wafer shipper—have been the industry standard for nearly 40 years. Advanced platforms like the SB300 Front Opening Shipping Box (FOSB) help Entegris retain technological leadership for shipping products.

 

Click here to select from Wafer Shipping and Processing products.

 

Reticle Handling
The high cost of reticles makes it imperative to provide protection against elements that can reduce their useful life or affect the quality of the process. Entegris offers a variety of mask packages, carriers, boxes and SMIF pods to safely transport masks and reticles, helping to reduce manufacturing costs and improve yields.

Entegris offers several advanced products—like the Clarilite Reticle Haze Prevention System— that provide superior protection for reticles during transport or storage in 193 nm lithography applications.

Service Solutions
Service Solutions offer on-site and off-site cleaning, recycling and certified re-use of Entegris and competitive products. Service Solutions enable customers to focus on core competencies while reducing capital expenditures.
Reticle SMIF Pods and Mask Packs
FOUPs (A300, F300, Spectra®)
Shippers (Crystalpak®, Ultrapak®, FOSB)
Clarilite Reticle Haze Prevention