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Filtration
- AMC Filtration
- Gas Diffuser
- Gas Filtration
- Liquid Filtration
Fluid Handling
Wafer/Reticle Handling
- Reticle Haze Prevention
IC Device Handling
Purification
- Gas Purification
- Liquid Purification
Disk Drive Handling
Emerging Technologies
- E-clamps
- Fuel Cells
- Post-CMP Cleaning Brushes
- Specialty Coatings

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Fluid Handling

Entegris fluid handling systems comprise the industry’s broadest range of carefully developed and fully characterized fluid handling products, including Components (valves, fittings and tubing), Chemical Containers, Sensing and Control Products (flowmeters, controllers, pressure transducers), Photochemical Dispense Pumps and Subsystems like the LiquidLens™ UPW purification system to enable immersion lithography process advancements.

Click here to select from and place orders for Fluid Handling products.

LiquidLens™ UPW System	IntelliGen® Mini Dispense System	Integra® Valves
NT® Sensing and Control	FluoroPure® Containers