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Controlling contamination in liquid, air and gas process streams enables more productive and technologically superior semiconductor, flat panel displays, data storage and other microelectronic manufacturing processes. Entegris develops filtration solutions based on a variety of membrane and media technologies and performance criteria.
Solutions for airborne molecular contamination control
Sintered nickel technology with 0.003 µm filtration technology in integrated filters/diffusers
Nickel, stainless steel and Teflon® filtration technologies
Membrane and depth media filtration technologies