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Entegris' innovative gas microcontamination control products and technologies help ensure our customers are equipped with the latest technologies and are prepared for the challenges of tomorrow's advanced devices. One recent example is the CHS controlled humidity source used to introduce humidity to process and carrier gases such as CDA (clean dry air) and N2, providing a continuous source of ultrapure humidified gas to the process tool.
Designed for the removal of gaseous contaminants down to part-per-trillion levels in continuous high-flow systems.
Designed for the removal of gaseous contaminants down to part-per-trillion levels with inorganic media.
Need help selecting the right purifer for your requirements?
Entegris offers our new Gas Purifier Wizard to help you through the process. Just click on the link below!