Home > Products > Emerging Product Technologies > E-clamps

Products

Filtration
- AMC Filtration
- Gas Diffuser
- Gas Filtration
- Liquid Filtration
Fluid Handling
Wafer/Reticle Handling
- Reticle Haze Prevention
IC Device Handling
Purification
- Gas Purification
- Liquid Purification
Disk Drive Handling
Emerging Technologies
- E-clamps
- Fuel Cells
- Post-CMP Cleaning Brushes
- Specialty Coatings

Select one or more of the following fields in order to begin your search.
	Search by Industry		Applications or process step		Keyword or Product Name
		and/or		and/or

Email This Page

Print This Page

Email this page to a friend

To send this page to someone by email, complete the form and click "send."

An email has been sent to your friend.

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

E-Chucks

Electrostatic Clamps that exhibit high clamping force and low backside particle count

Entegris is a pioneer in the fabrication and commercialization of ceramic E-Chucks (Electrostatic Clamps) and has been supplying to this industry for more than 10 years. E-chucks have become essential tools in the silicon wafer processing industry by significantly increasing usable wafer area and wafer throughput, both of which contribute to increased yields.

All Entegris E-Chucks are precision manufactured in-house.