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Designed for use with AMAT®, Ontrak® and Ebara® CMP equipment, Planarcore® PVA brushes feature molded-through-the-core construction for superior performance and wafer-to-wafer cleaning consistency. While other brushes are merely friction fitted, the molded-through-the-core construction prevents PVA slippage and improves dimensional stability.
Planarcore® PVA brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.