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Wafergard® Gas Filters

In-line filtration solutions for all process gases

Wafergard® in-line gas filters are available in nickel, stainless steel or PTFE/PFA membranes to match the specific needs of each class of process gas. Wafergard filters offer excellent downstream cleanliness, high-efficiency filtration with outstanding flow differential performance.

Wafergard C2 1.125" C-Seal Surface Mount Sandwich Gas Filters

All-metal ultrapure filter dramatically reduces footprint

Provides the industry’s best filter in a surface-mount design
Inlet feed through to device mounted above provides filtration/protection of returning gas to ensure cleanliness for downstream devices
Available with nickel or stainless membrane

Wafergard II F-40 Gas Filters

Superior particulate filtration for ultrapure gas systems

PTFE membranes provide high efficiency filtration
Low pressure drop reduces the risk of condensation in low vapor pressure gases
Excellent compatibility with all classes of semiconductor process gases
For use with inert and reactive gases, including ozone

Wafergard II F-6 Gas Filters

Superior particulate filtration for ultrapure gas system filtration

PTFE membranes provide high efficiency filtration
Low pressure drop reduces the risk of condensation in low vapor pressure gases
Excellent compatibility with all classes of semiconductor process gases
For use with inert and reactive gases, including ozone

Wafergard II F Micro In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

PTFE membranes provide high efficiency filtration
Low pressure drop reduces the risk of condensation in low vapor pressure gases
Excellent compatibility with all classes of semiconductor process gases
For use with inert and reactive gases, including ozone
Compact footprint with a maximum diameter of 19.05 mm (0.75")

Wafergard II F Mini XL In-line Gas Filters

Superior particulate filtration for ultrapure gas systems

PTFE membranes provide high efficiency filtration
Low pressure drop reduces the risk of condensation in low vapor pressure gases
Excellent compatibility with all classes of semiconductor process gases
For use with inert and reactive gases, including ozone

Wafergard II SF Mini In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Patented stainless steel membrane provide high efficiency filtration
Ideal for high-temperature and dynamic-pressure applications
Excellent compatibility with most ultrapure semiconductor process gases
For use with inert and reactive gases
Typical use up to 30 SLPM

Wafergard II SF Mini XL In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Patented stainless steel membrane provide high efficiency filtration
Ideal for high-temperature and dynamic-pressure applications
Excellent compatibility with most ultrapure semiconductor process gases
For use with inert and reactive gases
Typical use up to 60 SLPM

Wafergard III NF-30 In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O₃ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 30 SLPM

Wafergard III NF-75 In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O₃ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 75 SLPM

Wafergard III NF-750 Gas Filters

Superior particulate filtration for high-purity gas system filtration

Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O₃ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 750 SLPM

Wafergard III NF Micro In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O₃ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications

Wafergard III NF Mini In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O₃ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 60 SLPM

Wafergard III NF Mini XL In-Line Gas Filters

Superior particulate filtration for ultrapure gas system filtration

Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O³ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 120 SLPM

Wafergard GN Gas Filter Gun

Easy-to-use, lightweight POU gas filter

For point-of-use filtration of compressed gas
Rated for 0.003 μm particle retention in gas applications
Provides 10 cm² of effective filtration area for high flow rates
Nylon design, resistant to corrosion in acid and most solvent environments

Wafergard GTL In-line Gas Filters

Remove particles from inert gases for flow rates up to 80 SLPM

Efficient, low-cost point-of-use filtration of inert gases
For flow rates up to 80 SLPM

Wafergard GT-Plus In-line Gas Filters

Remove particles from inert gases for flow rates up to 30 SLPM

Efficient, low-cost point-of-use filtration of inert gases
For flow rates up to 30 SLPM

Wafergard MAX In-line Teflon® Gas Filters

Superior particulate filtration for ultrapure gas applications

All Teflon® filter element provides the industry’s best performance for ultrapure applications
Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
Specifically designed for high flow and low delta pressure applications
For use with inert and reactive gases, including ozone
Pre-conditioned for fast startup (Silver only)
Select ultrahigh purity (Silver) or high purity (Bronze) surface finish

Wafergard T-line Gas Filters

Clean, dry air for industrial applications

Flow rates of up to 1500 SLPM (50 SCFM)
Effectively retains particles of 0.003 μm size and above
Easy filter replacement without breaking gas line connections
For use in non-toxic and non-flammable inert gas
Available with 6-stack, 12-stack and 40-stack gas cartridge filters

Wafergard W-Seal Surface-Mount Gas Filters

All-metal W-seal gas filters for ultrapure surface-mount applications

Entegris’ best filters in a W-seal surface mount design
Ideal for high-temperature and dynamic-pressure applications
Available with stainless steel membrane for inert, hydride and CO gases
Available with nickel membrane for inert and reactive gases