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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Pumpgard™ II Filters

Designed to protect chemical pumps from wafer particles

Pumpgard™ II filters protect chemical pumps and final filters against damage from broken silicon wafer pieces. Pumpgard II filters have a 60 μm retention rating, which is ideal to capture larger wafer pieces before they reach the pump and/or final filter.

Pumpgard II Filters

Protecting wet station chemical pumps from wafer particles

Cost-effective protection of expensive chemical pumps and final filters
Large pore size for component protection with minimum system pressure drop
Fluoropolymer construction for compatibility with most acids, bases and non-flammable solvents
Compact design for easy installation/retrofit to existing system