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Fluoroline™ Filters

Low flow rate liquid filter

Developed from the Mykrolis® contamination control technologies, Fluoroline™ disposable filters are designed for the filtration of high-purity process fluids at very low flow rates. Fluoroline-S disposable filters utilize a hydrophobic PTFE membrane and are compatible with a wide range of acids, bases, and non-flammable solvents. Typical uses include the point-of-use filtration of SOG, ARC, hexamethyldisilazene (HMDS), photoresist, developer and water.

Fluoroline-S Disposable Filters
Disposable filters for small volume point-of-use filtration of non-flammable solvents, acids, and bases
  • Small, cost-effective for low-volume filtration
  • Hydrophobic PTFE membrane filter, compatible with a wide range of acids, bases and non-flammable solvents
  • High-purity connections with no o-rings avoid potential sources of contamination and ensure downstream cleanliness