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Developed from the Mykrolis® contamination control technologies, Fluoroline™ disposable filters are designed for the filtration of high-purity process fluids at very low flow rates. Fluoroline-S disposable filters utilize a hydrophobic PTFE membrane and are compatible with a wide range of acids, bases, and non-flammable solvents. Typical uses include the point-of-use filtration of SOG, ARC, hexamethyldisilazene (HMDS), photoresist, developer and water.