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Physical Vapor Deposition (PVD) Coatings

Specialty coatings of alumina, aluminum nitride alluminum oxynitride and yttria

Entegris specializes in the deposition of metal and metal-alloy coatings by a variety of PVD processes including sputtering, ion plating and evaporation. The PVD process can be used to deposit coatings on a variety of vacuum compatible substrates including metals, ceramics and polymers at low temperature (<250°C). The coatings are dense, strongly adherent and micro-grained.

PVD Coating Benefits:

  • Dense and micro-grained
  • Deposited on variety of substrates including metals, ceramics and polymer
  • Specialty coatings of alumina, aluminum nitride, aluminum oxynitride, yttria are deposited at a faster rate of deposition


Process Capabilities:

Entegris has variety of chamber sizes capable of depositing coatings on parts up to 20” in diameter. Entegris utilizes a variety of processes to deposit various metals and alloys.

  • Radio Frequency Diode sputtering
  • DC Diode sputtering
  • DC or RF Magnetron sputtering
  • Pulsed Magnetron sputtering
  • Reactive sputtering
  • Sputter ion plating
  • Ion etching/Ion beam sputtering
  • Thermal evaporation
AluMax™ Coating
Micrograin aluminum oxide
  • Dense, strongly adherent and amorphous alumina coating applied using reactive DC pulsed magnetron sputtering
  • Protects metal and alloy components against high temperature oxidation
  • Suitable for high temperature applications such as a bond coat for thermal barrier coating (TBC) systems
  • Oxidation resistant to 1100°C
Ultrapure Gold™ Microcoating
Wear-resistant hard coating
  • Wear resistant coating on cutting tools such as end mills, taps, chasers, reamers, punches, and plastic injection molding hardware
  • Excellent adhesive wear
  • Anti-galling and anti-sticking properties
Radio Opaque Gold™ Coating
Ideal for use with a variety of biomedical devices
  • Biomedical applications such as intravenous markers, implants, stents, catheters and guide wires
  • Thin but extremely dense coating provides high contrast and sharp edges when viewed on film or a fluoroscope
  • Easily bent and highly flexible
  • Eliminates the need for crimping and swaging bands of metal on devices
  • Excellent mechanical properties
Ziramic™ Coating
Ceramic-metal coating based on a complex compound of zirconium metal
  • Suitable for cutting tools such as end mills, taps, chasers, reamers, punches and plastic processing tools
  • Excellent release properties
  • Superior wear resistance