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Physical Vapor Deposition (PVD) Coatings

Specialty coatings of alumina, aluminum nitride, aluminum oxynitride and yttria

Entegris specializes in the deposition of metal and metal-alloy coatings by a variety of PVD processes including sputtering, ion plating and evaporation. The PVD process can be used to deposit coatings on a variety of vacuum compatible substrates including metals, ceramics and polymers at low temperature (<250°C). The coatings are dense, strongly adherent and micro-grained.

 

PVD Coating Benefits:

  • Dense and micro-grained
  • Deposited on variety of substrates including metals, ceramics and polymer


Process Capabilities:

Entegris has variety of chamber sizes capable of depositing coatings on parts up to 20” in diameter. Entegris utilizes a variety of PVD processes to deposit various metals, alloys and compounds.

  • Radio Frequency or DC Diode sputtering
  • DC or RF Magnetron sputtering
  • Pulsed Magnetron sputtering
  • Reactive sputtering
  • Sputter ion plating
  • Ion etching/Ion beam sputtering
  • Thermal evaporation
ALON™ Coating
Highly fluorine etch-resistant and transparent coatings
  • Excellent fluorine etch resistance
  • Low particle generation
  • Dense and transparent
  • Oxidation and errosion resistant
  • Ideal for semiconductor and high-temperature applications
AluMax™ Coating
Micro-grain aluminum oxide
  • Dense, strongly adherent and amorphous alumina coating deposited using reactive DC pulsed magnetron sputtering
  • Oxidation resistant to 1100°C
  • Protects metal and alloy components against high-temperature oxidation
  • Suitable for high-temperature applications
Radio Opaque Gold™ Coating
Pure gold coating
  • Compiant and highly-flexible coating
  • Excellent mechanical properties
  • Thin but extremely dense coating that provides high contrast and sharp edges when viewed on film or a fluoroscope
  • Eliminates the need for crimping and swaging bands of metal on devices
Ultrapure Gold™ Microcoating
Wear-resistant hard complex nitride coating
  • Excellent resistance to adhesive wear
  • Anti-galling and anti-sticking properties
  • Wear resistant on cutting tools such as end mills, taps, chasers, reamers, punches and plastic injection molding hardware
Yttria™ Coating
Fluorine etch resistant yttirum oxide coating
  • Excellent fluorine etch resistance
  • Low particle generation
  • Dense and transparent
  • Oxidation and errosion resistant
  • Ideal for semiconductor and high-temperature applications
Ziramic™ Coating
Ceramic-metal coating based on a complex compound of zirconium metal
  • Excellent release properties
  • Superior wear resistance
  • Suitable for cutting tools such as end mills, taps, chasers, reamers, punches and plastic molding components