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Fluorogard® Filters

PTFE membrane filter for Photoresist Residue Removal Applications

Fluorogard RS filters and pre-filters deliver ultimate protection from films, gels, and hard particle contamination by providing high capacity removal of contaminants from photoresist stripping and residue removal chemistries. Specifically designed for long-life filtration of photoresist stripping chemistries at elevated temperatures.

Fluorogard RS Filter Family

PTFE membrane filter for photoresist residue removal applications

High-capacity multiple layer, membrane optimized structure and layering technology
Available in cartridges and disposable filters. Disposables available with Flaretek®, Pillar® and Flowell® compatible fittings
Provides excellent gel and small particle retention in a single cartridge design
High-flow cartridge design with optimized membrane pleating