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Protego® Filters/Purifiers

Metal ion purifiers and filters
The Protego® family of metal ion purifers and purifier/filter cartridge and disposable filters remove metal ion contamination from UPW and select organic solvents. Protego metal ion purifiers deliver ultimate protection from metal ion contamination by providing high-capacity single-pass removal of metal ions. Protego purifiers are ideal for critical cleaning applications including DI water rinse on recirculation and single-pass process tools, wafer dry and post-CMP clean.
Protego Metal Ion Purifier/Filters
High-capacity, single-pass removal of metal ion contamination from ultrapure water and some organic solvents
  • Deliver ultimate protection from metal ion contamination
  • Provides high-capacity, single-pass removal of metal ions from ultrapure water and some organic solvents
  • Ideal for critical cleaning applications including DI water rinse on recirculation and single-pass process tools, wafer dry and post-CMP clean