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Planargard® Filters

Bulk CDS filter for CMP slurry

Entegris’ Planargard® melt-blown graded density slurry filters provide CMP applications the critical performance balance between the removal of defect-causing agglomerate gels and the delivery of the necessary slurry solution to the wafer surface. Designed for use in copper, STI, ILD and tungsten applications, the wide variety of Planargard filters capture particles in silica, ceria or alumina slurries.
Planargard CL Bulk Cartridge Filters
Designed to meet the needs of next generation slurry
  • Designed to meet the needs of next-generation copper and ILD applications
  • Optimized depth media allows enhanced filtration performance and longer life
  • Available as a filter cartridge in 5”, 10”, 20” and 30” lengths
  • Available in .0.3 µm, 0.5 µm, 0.7 µm, 1.0 µm retention ratings
  • All polypropylene construction with melt-blown wrapped depth filtration media
  • Designed to work with Chemlock® housings
Planargard CMP Cartridge Filters
Bulk filtration of CMP slurries
  • Available in 10”, 20” and 30” cartridges
  • Available in a range of sizes from <1 μm to 50 μm
  • Graded-density depth filter retains defect-causing agglomerates, removing only those particles that are distruptive
  • Designed to work with Chemlock® housings for rapid filter changeout
Planargard CS Bulk Cartridge Filters
Designed to meet the needs of next generation copper and ILD slurries
  • Nonwoven depth media design enables filter to retain defect-causing agglomerates with high efficiency
  • Excellent retention of agglomerates while allowing consistent, desired “working” slurry particles to reach the wafer surface
  • Depth filter greatly reduces the potential for premature filter ‘plugging’
  • Available in .0.2 µm , 0.3µm, 0.5 µm, 0.7 µm, 1.0 µm retention ratings
  • Available as a filter cartridge in 5”, 10”, 20” and 30” lengths
  • Designed to work with Chemlock® housings