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Impact® Filters

Point-of-use photochemical filter for BARC, Resist and TARC materials

Impact® filters are designed for point-of-use (POU) photochemical applications such as BARC, Resist and TARC materials. Utilizing Entegris’ UPE (ultra high molecular weight polyethylene) membranes, Impact filters remove hard particles and gels from photochemicals.
Impact Plus Filter
Point-of-use filter for photochemicals: including photoresists and solvents
  • Ultra-high molecular weight polyethylene (UPE) membrane technology
  • Rapid filter change-out design
  • Low hold-up volume limits chemical waste
  • Designed for use with the Impact® ST manifold and IntelliGen® Mini dispense system
Impact 2 Filter Family
Rapid changeout UPE membrane filters for point-of-use photochemical filtration, including photoresists and solvents
  • Developed for use with the Impact® 2 manifold and IntelliGen® dispense systems
  • Point-of-use photochemical and solvent filtration
  • Minimal chemical exposure, rapid connection design
  • UPE and surface modified UPE membrane technology
  • Low hold-up volume minimizes chemical waste
Impact Mini Filters
Rapid changeout UPE membrane filter for point-of-use photochemical filtration, including photoresists and solvents
  • Ultra low hold-up volume minimizes chemical waste, reduces opportunities for nucleation sites
  • Low surface area reduces chemical waste during filter startup
  • Lower surface area and elimination of a cage insures lower extractables and ultra cleanliness
  • Designed for use with IntelliGen® Mini dispense system
Impact ST Manifold
For use with Impact Plus disposable filters
  • Rapid filter changeout with minimal dripping: no tools and no draining required
  • Compact design provides easy installation or retrofit into existing tools
Impact 2 Manifold
For Impact 2 liquid filters
  • Compact, stable design provides easy installation
  • Rapid filter changeout with minimal exposure to process fluids