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Panelgard™ Filters

Point-of-use filters for flat panel display manufacturing applications

Developed from Mykrolis® contamination control technologies, Panelgard™ liquid filters are designed to deliver cost effective control of defect-causing particles in flat panel display applications. Featuring polytetrafluoroethylene (PTFE ),  polyethersulfone (PES), ultra high molecular weight polyethylene (UPE) or polypropylene (PP) membrane technologies, Panelgard liquid filters are designed for a variety of chemistries, such as photoresist, acid, alkalis and ultra pure water.
Panelgard 226 Filter Family
High-flow Cartridge Filters for Flat Panel Display Applications
  • Polyethersulfone and polypropylene membrane technology available
  • All polypropylene (PP) construction
  • High-flow, durable cartridge design
Panelgard 334 Cartridge Filter Family
Higher Flow Liquid Filters for Flat Panel Display Applications
  • High flow rate and long product life enables overall cost savings
  • Wide variety of configurations and membrane technologies available to meet large format flat panel display applications
Panelgard PS Cartridge Filter Family
Hydrophilic polysulfone membrane for point-of-use filtration in flat panel display and semiconductor manufacturing applications
  • Hydrophilic, polysulfone membrane
  • Asymmetric membrane structure
  • All polypropylene construction
Panelgard PDP Cartridge Filters
Point-of-use filter for pigment dispersed photoresist, acids, alkalis and pure water
  • Unwoven polypropylene membrane for high retention efficiency, high flow rate and long product life
  • Hydrophilic membrane requires no prewetting in aqueous-based chemistries
  • Cost-effective construction