Close
 
header top curve
Home   >   Industries   >   Semiconductor   >   Vacuum Processes   >   Wafergard® Gas Filters   >   Wafergard® GTL In-Line Gas Filters

Industries

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Wafergard® GTL In-line Gas Filters

Remove particles from inert gases for flow rates up to 80 SLPM
 
Wafergard® GTL In-line Gas Filters
  • Efficient, low-cost point-of-use filtration of inert gases
  • For flow rates up to 80 SLPM
 
Wafergard® GTL In-line Gas Filters
Materials:
 Membrane: Hydrophobic Teflon® fluoropolymer PTFE

Supports/housings: Polysulfone

Connections: Rc1⁄4 (PT1⁄4 female), 1⁄4” NPT female

Membrane area: 25 cm2 (3.9 in2)
Particle retention:
 >99.9999999% removal of all particles greater than 0.003 μm diameter (verified at the most penetrating particle size)
Operating conditions:
 Maximum operating pressure: 0.41 MPa (4.1 bar, 56.6 PSID) at 20°C

Maximum forward differential pressure: 0.41 MPa (4.1 bar, 56.6 PSID) at 20°C

Maximum reverse differential pressure: 0.03 MPa (0.3 bar, 4.35 PSID) at 20°C

Maximum operating temperature: 50°C (122°F)
Dimensions:
 Diameter: 25 mm (0.98”)

Length: 101 mm (4.0”)
Related Products