Close
 
header top curve
Home   >   Industries   >   Aerospace   >   Specialty Coatings   >   PECVD Coatings   >   Product Group

Industries

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

OxiMax™ Coating

Ultrapure, transparent silicon oxide coating
 
  • Oxidation and errosion resistant
  • Optically transparent
  • Excellent breakdown voltage
  • Particle reduction during semiconductor wafer processing
  • AR properties make it suitable for coating IR optics
 
OxiMax™ Coating
Substrate:
 Compatibility: Most metals and ceramics

Size: Up to 91 cm (36")

Geometry: Any shape, including complex geometries
Structure:
 Amorphous
Temperature:
 Deposition: 150˚C (302˚F)

Use: 1000˚C (1832˚F)
Coating thicknes:
 A few nm to over 100 μm
Electrical resistivity:
 ~10-13 Ω-cm
Harness:
 800 DPHN
Dielectric strength:
 80 V/micron
Purity:
 99.95%
Wear resistant:
 Very good
Corrosion resistance:
 Excellent aqueous corrosion resistance

Resistant to acids and alkalis