Home > Industries > Semiconductor > Wet Etch and Clean

Industries

Semiconductor
- CMP
- Facilities
- Vacuum Processes
- Photolithography
- Plating
- Premium Graphite
- Specialty Coatings
- Wafer Handling
- Wet Etch and Clean
Flat Panel Display
- Cell Process
- Color Filter
- Facilities
- Flat Panel Display Handling
- Thin Film Transistors
Compound Semiconductor
- Filtration
- Purification
- Wafer Shipper
Data Storage
- Hard Disk Drive
- Hard Disk Media
- Disk Drive & Component Handling
- Substrates
Energy Solutions
- Fuel Cells
- Photovoltaic
Aerospace
- Premium Graphite
- Specialty Coatings
Medical
- Premium Graphite
- Specialty Coatings
Emerging Technologies
- Electrostatic Clamp
- PVA Brushes

Select one or more of the following fields in order to begin your search.
	Search by Industry		Applications or process step		Keyword or Product Name
		and/or		and/or

Email This Page

Print This Page

Email this page to a friend

To send this page to someone by email, complete the form and click "send."

An email has been sent to your friend.

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Wet Etch and Clean

Purity, materials management and process control solutions

Wet etch and clean (WEC) processes touch wafers more than any single application in the semiconductor fab. WEC processes modify and clean the wafer surface with a critical influence towards meeting the demanding yield requirements of an effective fab. These processes utilize the most aggressive chemistries: strong acids, oxidizers, solvents, high temperatures and highly concentrated substances. The process materials and parameters must be controlled to levels other industries cannot achieve in terms of repeatability and consistency. Entegris provides the solutions to succeed under these extreme conditions.

To find product information on Entegris filtration solutions, go to the Filtration Product Catalog

To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog

To find product information on Entegris purification solutions, go to the Purification Product Catalog

To find product information on Entegris wafer handling solutions, go to the Wafer/ Reticle Handling Product Catalog

Filter products by Application or Process Step

Filter Results: Your selection returned the following items within this category.

Chemlock® Housings Designed for tool space saving and easy filter cartridge changeout.	Etchgard™ Filters Designed for rapid particle removal in HF and BOE recirculation baths processes.	Fluorogard® Filters PTFE membrane filter designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals.
Fluoroline™ Filters Designed for filtration of high-purity process fluids at very low flow rates.	Guardian™ Filters Designed as a cost effective solution to a variety of chemistries: including high-pH solutions, copper and nickel plating applications.	Intercept® Cartridge and Disposable Filters Most advanced dual-retention filtration for critical DHF/BOE cleaning applications
Protego® Filters/Purifiers Designed to remove metal ion contamination from ultrapure water and some organic solvents.	QuickChange® Nondewetting PTFE Filters Designed for use in advanced liquid filtration with both aqueous and non-aqueous chemistries. All PTFE membranes.	Torrento™ Filters Designed for advanced wet etch and clean applications requiring the highest flow rate performance in aqueous chemistries.