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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Specialty Coatings

PVD and PECVD coatings deposited at low temperature

(Formerly the Semiconductor Division of Surmet Corporation)

 
Entegris has long been an industry leader in providing products that purify, protect and transport critical materials and substrates to the Semiconductor industry. To complement this contamination control and wafer handling product leadership, Entegris recently acquired the high purity specialty coatings business of Surmet Corporation, a supplier of e-clamps and wafer handling components for leading semiconductor OEM process tools.
 
Entegris Specialty Coatings launches a new era in advanced materials, enabling critical solutions to the most demanding manufacturing problems in semiconductor processes, aerospace, data storage, medical devices and a variety of specialty industrial applications. Using our market and technological leadership in materials science and micro and molecular contamination control, Entegris Specialty Coatings helps customers enhance yields, improve productivity and meet their technology roadmaps.
Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

Amorphous, dense and conformal silicon and carbon coatings deposited at low temperature

Physical Vapor Deposition (PVD) Coatings

Dense and micro-grained coatings of metals, oxides and nitrides deposited at low temperatures