Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Controlling sources of contamination in copper and nickel plating/depostion (ECP/ECD) applications continues to grow in importance. Entegris provides a reliable solution to this challenge with it's liquid filtration technology.
Designed as a cost effective solution to a variety of chemistries: including high-pH solutions, copper and nickel plating applications.
Designed for tool space saving and easy filter cartridge changeout.