Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid filters for TFT (thin film transistor) processes and chemistries, including: wet etching, detergent, DI cleaning, stripper, rework, photoresist coating, thinner, HMDS, developer, DI water and scrubbers.
Entegris does. So you can.
To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog
Designed for point-of-use filtration in flat panel display manufacturing applications.
Designed for prefiltration of DI Water and process chemistries.
PTFE membrane filter designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals.
Designed for tool space saving and easy filter cartridge changeout.