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Facilities (BCDS and CDS)

Chemical Delivery Systems for Flat Panel Display Applications

Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid filters for chemical delivery systems and other facility related operations, including:  acids, bases, solvents, developers and detergents.

 

Entegris does. So you can.

 

To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog

Filter products by Application or Process Step
Filter Results: Your selection returned the following items within this category.
QuickChange® Filters

Designed for use in advanced liquid filtration with both aqueous and non-aqueous chemistries. 

Microgard™ Filters

Designed for high retention efficiency water, chemical and photochemical applications.

Guardian™ Filters

Designed as a cost effective solution to a variety of chemistries: including high-pH solutions, copper and nickel plating applications.

Intercept® Filters

Designed with a UPE membrane that provides sieving as well as physiosorption particle removal to provide ultra particle retention and process capabilities.

Panelgard™ Filters

Designed for point-of-use filtration in flat panel display manufacturing applications.

Chemlock® Housings

Designed for tool space saving and easy filter cartridge changeout.