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As the technology in wafer and thin-film based photovoltaic technologies continues to accelerate, the need for advanced process fluid filtration and substrate handling intensifies. Removing defect-causing and yield-limiting contaminants from process fluids has been a fundamental principle of other high-technology applications. Photovoltaic cell makers are discovering the benefits of liquid and gas filters and purification technologies along with improvements in the substrate handling solutions being developed for wafer and thin film applications. The advantages of silicon carbide as a replacement for quartz-based carriers are also gaining acknowledgement as an effective cost reduction tool. Entegris has solutions to these challenges developed from over 40 years of materials science expertise in semiconductor and other microelectronic applications.
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Gas filtration and purifications solutions to control sources of contamination
Premium Graphite products for photovoltaic applications such as CVD, LPCVD, and RTA
Handling solutions for photovoltaic (PV) cell manufacturing