Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid filters for aluminum and glass substrate manufacturing processes, including: etching, detergent, cleaning, grinding, Ni/Zn plating, polishing, lapping, H3PO4 cleaning, KOH cleaning DHF cleaning DI/IPA cleaning processees and chemistry.
Designed for point-of-use filtration in flat panel display manufacturing applications.
Designed for prefiltration of DI Water and process chemistries.
Designed for use in advanced liquid filtration with both aqueous and non-aqueous chemistries.
PTFE membrane filter designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals.
Designed with a UPE membrane that provides sieving as well as physiosorption particle removal to provide ultra particle retention and process capabilities.
Designed to remove metal ion contamination from ultrapure water and some organic solvents.
Designed for tool space saving and easy filter cartridge changeout.