Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid filters for texturizing, detergent, DI water, IPA cleaning, polishing and lubrication manufacturing processes and chemistry. These filtration technologies are designed for use with removable hard disk media such as CD and DVD.
Designed for prefiltration of DI Water and process chemistries.
Designed to remove metal ion contamination from ultrapure water and some organic solvents.
Designed as a cost effective solution to a variety of chemistries: including high-pH solutions, copper and nickel plating applications.
Designed for high retention efficiency water, chemical and photochemical applications.
Planarcore® PVA brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.